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Wafer scratch AOI inspection machine
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Wafer scratch AOI inspection machine

Wafer scratch AOI inspection machine

The wafer scratch AOI inspection machine is mainly used for detecting obvious scratch defects such as missed scratches, defocusing, uncut, and bicrystals on the core grains on the Disco ring after wafer splitting machine processing. Through Machine Vision defect detection, the presence or absence of the above defects can be detected to distinguish between good and defective products, reduce manual labor, and improve detection efficiency.

Project

Performance index

Detection system

Detection range

(Product size)

4-inch material box size: 222mm × 215mm × 145mm (L × W × H)

Disco ring size: 212 (L) × 212 (W) mm, Ø 194 (inner ring), Ø 228 (outer ring), 1.2 (thickness) mm

Weight: Empty ring 66.5g, actual weight 86.5g (piece weight 20g)

6-inch material box size: 288mm × 279mm × 182mm (L × W × H)

Disco ring size: 212 (L) × 212 (W) mm, Ø 194 (inner ring), Ø 228 (outer ring), 1.2 (thickness) mm

Weight: Empty ring 154.5g, actual weight 224.5g (piece weight 70g)

Testing items

Omission, defocusing, uncut, twin crystal

Detection accuracy

3.5um

Loss inspection rate

0.01%

Over inspection rate

0.5%

Capacity

4800pcs

Machine utilization rate

90%

Change line time

New model switching time<60 minutes

Existing model switching time<30 minutes

Others

Safety protection

Safety grating/safety door lock: used for personnel safety protection

FFU: Used for clean equipment to achieve Class 1000 and Class 100 cleanrooms in internal spaces

Static electricity: The material in contact with the product is made of anti-static material and equipped with an ion air rod to eliminate static electricity

Power supply

AC 220V±10% 50~60Hz

Ionic specifications

The ion dissipation rate in the homework area is less than 5 seconds; Ionic equilibrium voltage within 100V

Usage environment

Temperature: 5-40

Internal temperature of machine

Humidity: 25~85% RH (without condensation)

40

Positive pressure gas source

0.5~0.6MPa, access port provided by the manufacturer

Negative pressure gas source

-80kpa, access port provided by the manufacturer

 

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